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Transient 3D/2D simulation of laser-induced ablation of silicon

: Fell, A.; Kray, D.; Willeke, G.P.


Applied physics. A 92 (2008), Nr.4, S.987-991
ISSN: 0340-3793
ISSN: 0721-7250
ISSN: 0947-8396 (Print)
ISSN: 1432-0630 (Online)
Fraunhofer ISE ()

A numerical software has been developed to simulate heating, enthalpy-based phase changes and ablation of silicon during pulsed or continuous-wave laser irradiation. The unsteady heat transfer equation is solved by finite differences in two or three dimensions with full resolution of the thin liquid layer. An intelligent adaptive grid refinement and a semi-analytic treatment of the surface elements have been implemented to simulate laser cuts with lots of laser pulses in moderate computing time. The code has been successfully verified by comparisons with an analytic solution and with experimental data. Details of the mathematical model, the implementation in Matlab®and comparisons with experimental laser cuts are presented in this paper.