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Sub-micron coatings with low friction and wear for micro actuators

: Bandorf, R.; Lüthje, H.; Schiffmann, K.; Staedler, T.; Wortmann, A.

Reichl, H.:
Micro System Technologies 2001 : International Conference & Exhibition on Micro-Electro-, -Opto-, -Mechanical Systems and Components, Düsseldorf, March 27 - 29, 2001
Berlin: VDE-Verlag, 2001
ISBN: 3-8007-2601-7
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components <2001, Düsseldorf>
Fraunhofer IST ()

This paper deals with the fabrication and characterisation of friction and wear reduced nano-films for micro actuator applications. For this investigation films of diamond-like-carbon (DLC), metal doped Me-DLC, carbon-nitride CNx, boron-nitride BN and alumina Al2O3 films have been applied in the thickness range of 20 nm to 500 nm. The hardness of those coatings varied between 10 and 60 GPa. Micromechanical and microtribological properties of nano-coatings have been characterized by a modified scanning probe microscope. Besides this a novel micro tester for abrasive wear measurement of nano coatings was used. Friction of microcontact areas was measured by use of a pin-on-disc tester. It turned out, that friction was - besides other parameters - dependent on determination method and load. Friction determined at areal DLC / DLC contact zones was generally much higher (µDLC0.1) than diamond tip versus DLC (~µDLC0.06).