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Mechanical and piezoresistive properties of diamond-like carbon for MEMS

 
: Peiner, E.; Tibrewala, A.; Bandorf, R.; Biehl, S.; Lüthje, H.; Doering, L.

Gessner, T. ; MESAGO Messe Frankfurt GmbH, Stuttgart:
Smart systems integration 2007 : Paris, France 27. - 28.03.2007; With CD-ROM / 1st European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components
Berlin: VDE-Verlag, 2007
ISBN: 3-8007-3009-X
ISBN: 978-3-8007-3009-4
S.257-264
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components <1, 2007, Paris>
Englisch
Konferenzbeitrag
Fraunhofer IST ()

Abstract
Diamond-like carbon (DLC) was investigated as structural and functional material for MEMS applications. Integrated into standard bulk silicon micromachining, the processing of DLC benefited from a low deposition temperature, simple patterning by lift-off and an excellent etching resistance. MEMS components were realized and characterized including self-supporting sub-micron thick DLC cantilevers and DLC strain gauges on a silicon boss membrane tactile sensor. DLC cantilevers exhibited a large Young's modulus and fracture strength which can be exploited for MEMS resonators. Gauge factor, noise and thermal drift comparable with doped silicon combined with a very low susceptibility to light were observed with DLC strain gauges offering an extended degree of freedom for the design of rugged silicon sensors.

: http://publica.fraunhofer.de/dokumente/N-79783.html