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Thin film encapsulation technology for harms using sacrificial CF-polymer

 
: Reuter, D.; Bertz, A.; Nowack, A.; Gessner, T.

:

French, P.:
Transducers '07/Eurosensors XXI. The 14th International Conference on Solid-State Sensors, Actuators and Microsystems and the 21st European Conference on Solid-State Transducers : Lyon, France, 10 - 14 June 2007
Amsterdam: Elsevier, 2008 (Sensors and actuators. A, Physical 145/146.2008)
ISSN: 0924-4247
S.316-322
International Conference on Solid-State Sensors, Actuators and Microsystems <14, 2007, Lyon>
European Conference on Solid-State Transducers (Eurosensors) <21, 2007, Lyon>
Englisch
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer IZM ()
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/dokumente/N-77712.html