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2008
Journal Article
Titel
Modellierung optischer Messprozesse
Titel Supplements
Untersuchung der Interferenzmikroskopie mittels Simulationen
Alternative
Modelling of optical measurement methods. Analysis of interference microscopy via simulations
Abstract
This paper presents the findings of the project "virtual interference microscope". A simulation environment for optical measurement systems, especially for interference microscopes based on white-light interferometry, was designed at the Fraunhofer IPT. A raytracing module is basis for these simulations. This module maps the physical and optical path lengths. With this simulation environment the effects of external influences on the measurement result can by analyzed.