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Recent progress in CMOS integrated MEMS AO mirror development
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2007
Conference Paper
Titel
Recent progress in CMOS integrated MEMS AO mirror development
Author(s)
Gehner, A.
Schmidt, J.U.
Wildenhain, M.
Knobbe, J.
Wagner, M.
Hauptwerk
Adaptive optics for industry and medicine
Konferenz
International Workshop on Adaptive Optics in Industry and Medicine 2007
Language
English
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Fraunhofer-Institut für Photonische Mikrosysteme IPMS