English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
A new linearly extended bifocal microwave plasma device
Details
Full
Export
Statistics
Options
2001
Journal Article
Titel
A new linearly extended bifocal microwave plasma device
Author(s)
Kaiser, M.
Urban, Helfried
Emmerich, Rudolf
Elsner, Peter
Baumgärtner, K.-M.
Räuchle, E.
Zeitschrift
Surface and coatings technology
DOI
10.1016/S0257-8972(01)01319-6
Language
English
google-scholar
View Details
Fraunhofer-Institut für Chemische Technologie ICT