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Nano-Raman: Monitoring nanoscale stress

Nano-Raman: Aufzeichnung von nanogroßen Spannungen
: Uhlig, B.; Zollondz, J.-H.; Haberjahn, M.; Bloess, H.; Kücher, P.


Seiler, D.G. ; American Institute of Physics -AIP-, New York:
Frontiers of characterization and metrology for nanoelectronics : International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, Maryland, 27 - 29 March 2007
Melville, NY: AIP, 2007 (AIP Conference Proceedings 931)
ISBN: 978-0-7354-0441-0
International Conference on Frontiers of Characterization and Metrology for Nanoelectronics <6, 2007, Gaithersburg/Md.>
Fraunhofer IKTS ()
Halbleitertechnologie; Raman Spektroskopie; Eigenspannung; Miniaturisierung; Submikrometerbereich; SOI-Technik; laterales Auflösungsvermögen; Nanotechnik; Metrologie; Wafer=Halbleiterplättchen

Due to the new challenges accompanying every new shrink node in semiconductor industry new materials have to be implemented or device design has to be adapted - both to realize the intended device that still obeys phys. laws. Visualization of these problems is a task of metrologists facing themselves phys. borders. Monitoring stress becomes a major challenge arising from new processes applied as well as from worse surface to bulk vol.-ratio or intended implied stress in new concepts of devices. High k-materials might induce macroscopic stress, which can be monitored on the wafer scale in wafer bow expts. This unintended stress is even higher in patterned areas but not known in a micrometer scale. The knowledge of microscopic stress - or even nanoscopic stress - is even more important on intended stress implemented in devices and thus target of interest. This paper offers two ways of monitoring submicrometer stress. One is the well established scanning Micro-Raman technique. The second is a relatively new method called Tip-Enhanced-Raman-Spectroscopy (TERS). Both methods have their advantages but also challenges. The results of the easy to use scanning Micro-Raman technique need to be interpreted and information needs to be unfolded. Whereas the challenge of Tip-Enhanced-Raman-Spectroscopy lies in the exptl. skills: handling a scanning-probe-microscope-tip in a Micro-Raman beam with the perspective of having a resoln. restricted only by the SPM-diam. or even smaller.
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