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Combinatorial fabrication of thin film-libraries and evaluation of their piezoelectricity by ultrasonic piezo-mode imaging

: Rende, D.; Schwarz, K.; Rabe, U.; Maier, W.F.; Arnold, W.


Zeitschrift für physikalische Chemie 222 (2008), Nr.2-3, S.587-600
ISSN: 0044-3328
ISSN: 0044-3336
ISSN: 0942-9352
Fraunhofer IZFP ()
combinatorial chemistry; high-throughput; atomic force microscopy; ultrasonic piezo-mode

Piezoelectric materials are used in an ever increasing number of technical products. The need for new and improved piezoelectric materials is growing rapidly. Conventional methods are too slow to explore the potential parameter spaces. A combinatorial workflow has been developed to produce mixed oxide thin film libraries and screen them
for piezoelectric properties by atomic force microscopy in the ultrasonic piezo-mode. Validation and new findings are reported. Determination of piezoelectric properties in an automated fashion was only possible within the same class of materials.