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Evaluation of Air Gap structures produced by wet etch of sacrificial dielectrics: Critical processes and reliability of Air Gap formation
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2007
Conference Paper
Titel
Evaluation of Air Gap structures produced by wet etch of sacrificial dielectrics: Critical processes and reliability of Air Gap formation
Author(s)
Schulze, K.
Schulz, S.E.
Gessner, T.
Hauptwerk
Materials for advanced metallization, MAM 2007
Konferenz
European Workshop on Materials for Advanced Metallization (MAM) 2007
DOI
10.1016/j.mee.2007.05.037
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM