Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Roughness improvement of the COSi2/Si-interface for an application as buried silicide
| Travaly, Y.H.:
Materials for advanced metallization, MAM 2007 : The 16th European Workshop on "Materials for Advanced Metallization 2007", March 4 - 7, 2007, Brugge, Belgium
Amsterdam: Elsevier, 2007 (Microelectronic engineering 84.2007, Nr.11)
S.2537-2541 |
| European Workshop on Materials for Advanced Metallization (MAM) <16, 2007, Brugge> |
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| Englisch |
| Konferenzbeitrag, Zeitschriftenaufsatz |
| Fraunhofer ENAS ()
Fraunhofer IZM () |