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Dynamic characterisation of piezo resistive sensor systems for adaptronic devices

: Biehl, S.; Mayer, D.

Active systems for dynamic markets. Conference proceedings. CD-ROM : 23./24.05.2007, Göttingen, Adaptronic Congress 2007
Göttingen: Adaptronic Congress Veranstaltungs GbR, 2007
3 S.
Adaptronic Congress <11, 2007, Göttingen>
Fraunhofer WKI ()
Fraunhofer IST ()

The main part of the sensor system is an amorphous hydrogenated carbon layer, deposited in a plasma enhanced chemical vapour deposition process (PECVD). Under pressure the thin film layer changes its resistance without any deformation, in comparison to strain gauges. The thickness of the sensor layers is just 6 µm. It is a further development of the diamond like carbon DLC layers. They are well known as tribological coatings, in due to the fact that they have a small coefficient of friction (v0,2) [1, 2]. The sensor layer combines the excellent tribological characteristic with the piezo resistive. Thus it is possible to integrate the thin films in high load regions, like in the track of bearings [3,4].