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High-Rate Electron Beam Deposition: The Possibility of High-Quality Coating of Large Areas
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2007
Journal Article
Titel
High-Rate Electron Beam Deposition: The Possibility of High-Quality Coating of Large Areas
Author(s)
Rögner, F.-H.
Metzner, C.
Zeitschrift
Journal of applied surface finishing
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP