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Dynamic characterisation of piezo resistive sensor systems for adaptronic devices

: Biehl, S.; Mayer, D.


Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Symposium on Industrial Electronics, ISIE 2007 : 4 - 7 June 2007, Centro Cultural and Centro Social Caixanova, Vigo, Spain; Proceedings
New York, NY: IEEE, 2007
ISBN: 978-1-4244-0755-2
ISBN: 1-4244-0755-9
International Symposium on Industrial Electronics (ISIE) <2007, Vigo, Spain>
Fraunhofer IST ()
Fraunhofer LBF ()
Sensor; piezo; dynamisches System; dynamic system

This paper deals with the static and dynamic characterisation of novel piezo resisitive diamond like carbon layers which can be fabricated with high hardness and wear resistance. The advantage of these films, deposited in a plasma enhanced chemical vapor deposition process (PECVD), is the possibility to integrate them in a stiff environment for the detection of load. This is due to the fact, that they do not need any deformation like stain gauges. This property makes them interesting for adaptronic applications.