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Boundary conditions for the industrial production of LFC cells - Results from the joint project INKA

: Grohe, A.; Catoir, J.; Fleischhauer, B.; Preu, R.; Glunz, S.W.; Willeke, G.P.; Schneiderlöchner, E.; Lüdemann, R.; Liu, J.; Schramm, S.; Trassl, R.; Wieder, S.

Preprint urn:nbn:de:0011-n-665770 (148 KByte PDF)
MD5 Fingerprint: 78ffdc7adda4f99a13ed9cbc0617e937
Erstellt am: 24.1.2009

Poortmans, J. ; European Commission, Joint Research Centre -JRC-:
21st European Photovoltaic Solar Energy Conference 2006. Proceedings. CD-ROM : Proceedings of the international conference held in Dresden, Germany, 4 - 8 September 2006
München: WIP-Renewable Energies, 2006
ISBN: 3-936338-20-5
European Photovoltaic Solar Energy Conference <21, 2006, Dresden>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()

In this paper we report about some results achieved in the joint project named INKA ("In-line Kontaktierung mittels physikalischer Gasphasen-Abscheidung" i.e. "inline contacting by gas phase deposition") conducted by Fraunhofer ISE, Deutsche Cell and Applied Material (formerly Applied Films). We evaluated the feasibility of sputtering processes for the solar cell production as well as its application for the Laser-Fired Contacts (LFC) approach. In detail we present evaluations for the rear metallisation technology feasible to deposit sufficiently thick aluminum layers. Furthermore some high efficiency solar cell results achieved during this metallisation process evaluation are presented. Finally this knowledge was applied to produce industrial-type solar cells featuring a sputtered silicon nitride rear side passivation layer as well as 2 µm of aluminum contacted by LFC with a maximum efficiency of 16.7 %.