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Selective laser ablation of anti-reflection coatings for novel metallization techniques

: Grohe, A.; Harmel, C.; Knorz, A.; Glunz, S.W.; Preu, R.; Willeke, G.P.

Volltext urn:nbn:de:0011-n-665747 (345 KByte PDF)
MD5 Fingerprint: 913d1c743feb8bfed053f42e6bc0b6ee
Erstellt am: 3.10.2012

IEEE Electron Devices Society:
IEEE 4th World Conference on Photovoltaic Energy Conversion 2006. Vol.2 : Waikoloa, Hawaii, 7 - 12 May 2006
Piscataway, NJ: IEEE Operations Center, 2006
ISBN: 1-4244-0016-3
World Conference on Photovoltaic Energy Conversion (WCPEC) <4, 2006, Waikoloa/Hawaii>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer ISE ()

The industrial standard process for producing solar cell front sides includes several drawbacks. First of all the screen-printed front side metallisation with silver paste leads to contacts with a poor aspect ratio and a low conduction quality due to the composition of a printable paste. Additionally, the poor contact resistance requires high surface doping concentrations of the emitter. When using further developed cell concepts like the laser-fired contacted rear side (LFC) featuring dielectric passivation and a local point contact structure, the high-temperature step for establishing the front contact is detrimental too. A solution for this problem could be the use of alternative front side metallisation techniques. Without firing through they all require a selective opening of the front side antireflection coating. The approach studied in this paper is the selective laser ablation of this layer.