Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Design and fabrication of micromachined silicon based mid infrared multilenses for gas sensing applications

 
: Fonollosa, J.; Rubio, J.; Hildenbrand, J.; Hartwig, S.; Santander, J.; Moreno, M.; Marco, S.; Fonseca, L.; Wöllenstein, J.

:
Postprint urn:nbn:de:0011-n-664949 (1.2 MByte PDF)
MD5 Fingerprint: a9f0a44bb157315921713a576fd216f2
© 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Erstellt am: 13.7.2010


Delapierre, G. ; Institute of Electrical and Electronics Engineers -IEEE-:
Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2 : June 10-14, 2007, Lyon, France
New York, NY: IEEE, 2007
ISBN: 1-4244-0842-3
ISBN: 1-4244-0841-5
S.2565-2568
European Conference on Solid-State Transducers (Eurosensors) <21, 2007, Lyon>
International Conference on Solid-State Sensors, Actuators and Microsystems <14, 2007, Lyon>
Englisch
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPM ()
fresnel lenses; optical gas sensor; microoptics; silicon technology; RIE; NDIR

Abstract
To improve the sensitivity of a non-dispersive infrared optical gas sensor, diffractive Fresnel Lenses have been designed, fabricated and tested. The target gases determine the wavelengths for the lens design: 10.6µm, 9.7µm, 3.5µm, and 3.9µ m for ethylene, ammonia, ethanol, and the reference band; respectively. Four lenses have been fabricated on the same silicon substrate using Reactive Ion Etching. In order to reduce the number of photolithographic processes, a new design based on sharing sixteen quantization steps through the four lenses is done. Finally, the test of the fabricated device is presented.

: http://publica.fraunhofer.de/dokumente/N-66494.html