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Design and fabrication of micromachined silicon based mid infrared multilenses for gas sensing applications

: Fonollosa, J.; Rubio, J.; Hildenbrand, J.; Hartwig, S.; Santander, J.; Moreno, M.; Marco, S.; Fonseca, L.; Wöllenstein, J.

Postprint urn:nbn:de:0011-n-664949 (1.2 MByte PDF)
MD5 Fingerprint: a9f0a44bb157315921713a576fd216f2
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Erstellt am: 13.7.2010

Delapierre, G. ; Institute of Electrical and Electronics Engineers -IEEE-:
Transducers & Eurosensors 2007. 14th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.2 : June 10-14, 2007, Lyon, France
New York, NY: IEEE, 2007
ISBN: 1-4244-0842-3
ISBN: 1-4244-0841-5
European Conference on Solid-State Transducers (Eurosensors) <21, 2007, Lyon>
International Conference on Solid-State Sensors, Actuators and Microsystems <14, 2007, Lyon>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IPM ()
fresnel lenses; optical gas sensor; microoptics; silicon technology; RIE; NDIR

To improve the sensitivity of a non-dispersive infrared optical gas sensor, diffractive Fresnel Lenses have been designed, fabricated and tested. The target gases determine the wavelengths for the lens design: 10.6µm, 9.7µm, 3.5µm, and 3.9µ m for ethylene, ammonia, ethanol, and the reference band; respectively. Four lenses have been fabricated on the same silicon substrate using Reactive Ion Etching. In order to reduce the number of photolithographic processes, a new design based on sharing sixteen quantization steps through the four lenses is done. Finally, the test of the fabricated device is presented.