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High power pulse magnetron sputtering

A new process for industrial high quality optical coatings?
 
: Vergöhl, M.; Bandorf, R.; Giesel, P.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
S.MB7
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
Englisch
Konferenzbeitrag
Fraunhofer IST ()

Abstract
In high power pulse magnetron sputtering (HPPMS), a high ionisation of the sputtered material can be obtained. We applied HPPMS to deposit TiO2 optical thin films. Material and process properties are discussed.

: http://publica.fraunhofer.de/dokumente/N-66162.html