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High-rate sputtering of thick PZT layers for MEMS actuators

 
: Jacobsen, H.; Quenzer, H.-J.; Wagner, B.; Ortner, K.; Jung, T.

:

IEEE Robotics and Automation Society:
MEMS 2006 Istanbul : 19th IEEE International Conference on Micro Electro Mechanical Systems. Technical digest : Istanbul, Turkey, 22-26 January 2006
Piscataway, NJ, USA: IEEE Press, 2006
ISBN: 0-7803-9475-5
S.214-217
International Conference on Micro Electro Mechanical Systems (MEMS) <19, 2006, Istanbul>
Englisch
Konferenzbeitrag
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/dokumente/N-65095.html