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2021
Presentation
Titel
Frabrication and Evaluation of 4H-SiC Double Trench MOSFETs on 6-inch Wafer
Titel Supplements
Presentation held at ICAE 2021, 6th International Conference on Advanced Electromaterials, Hybrid Conference, November 9-12, 2021, Jeju, Korea
Author(s)
Kim, Seongjun
National Institute for Nanomaterials Technology, Pohang University of Science and Technology, Korea
Kang, Min-Jae
National Institute for Nanomaterials Technology, Pohang University of Science and Technology, Korea
Sung, Mi-Je
National Institute for Nanomaterials Technology, Pohang University of Science and Technology, Korea
Kwak, Juyoung
National Institute for Nanomaterials Technology, Pohang University of Science and Technology, Korea
Lee, Nam-Suk
National Institute for Nanomaterials Technology, Pohang University of Science and Technology, Korea
Shin, Hoon-Kyu
National Institute for Nanomaterials Technology, Pohang University of Science and Technology, Korea