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A new micro laser camera

: Drabe, C.; James, R.; Klose, T.; Wolter, A.; Schenk, H.; Lakner, H.


Dickensheets, D.L. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems VI : 24 - 25 January 2007, San Jose, California, USA
Bellingham, WA: SPIE, 2007 (SPIE Proceedings Series 6466)
ISBN: 978-0-8194-6579-5
Paper 64660I
Conference "MOEMS and Miniaturized Systems" <6, 2007, San Jose/Calif.>
Fraunhofer IPMS ()
BSOI; camera; CMOS; comb finger; interdigital; LASER; MEMS; MOEMS; resonant; single crystal

A new two-dimensional and resonantly driven scanning micro mirror has been simulated, fabricated and characterized. Features are a small chip size of 2900 µm x 2350 µm with a frame oscillating at frequencies in the range of 1 kHz. The frame carries a mirror of 500 µm diameter in a gimbal mounting oscillating at frequencies in the range of 16 kHz. The characteristic mechanical amplitudes are 21° and 28° respectively. Voltages of 60 V and less than 140 V were necessary to accomplish this. Much higher amplitudes have been achieved on the mirror axis without breaking the torsion bars. Initial difficulties in realizing the high amplitudes have been overcome by improving the geometry of the suspension. The initial design is presented as well as the measurement results of the initial and improved design. The device was used to develop a micro laser camera with high depth of focus. Pictures taken with the system are presented revealing the excellent resolution.