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Capacitive Micromachined Ultrasonic Transducers (CMUT) Utilized as Tactile Sensors

: Köble, S.; Krenkel, M.; Koch, S.G.; Urbahn, C.


Institute of Electrical and Electronics Engineers -IEEE-:
44th International Spring Seminar on Electronics Technology, ISSE 2021 : Bautzen, Germany, 5 - 9 May 2021, virtual web conference
Piscataway, NJ: IEEE, 2021
ISBN: 978-1-6654-3061-6
ISBN: 978-1-6654-1477-7
International Spring Seminar on Electronics Technology (ISSE) <44, 2021, Online>
Fraunhofer IPMS ()
Fraunhofer IFF ()

In this paper, Fraunhofer IPMS utilized its capacitive micromachined ultrasonic transducer(CMUT) technology for the evaluation of highly sensitive tactile sensors. The response of the sensor devices with two different coating materials upon pressure cycles was investigated by capacitive measures. The CMUTs successfully work as tactile sensor units. It was shown that OrmoComp® is beneficial for applications with a primary requirement for high sensitivity (3.52 aF/Pa). SU8 is the preferable material for applications needing short response times (0.8 s).