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High-Q photonic crystal resonator with large hole for microfluidic integration for biosensing

: Zhao, Yixiong; Buchholz, Jan; Ligges, Manuel; Bögel, Gerd vom; Balzer, Jan C.; Seidl, Karsten


Institute of Electrical and Electronics Engineers -IEEE-:
46th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2021 : 29 Aug.-3 Sept. 2021, Chengdu, China, Online Conference
Piscataway, NJ: IEEE, 2021
ISBN: 978-1-7281-9425-7
ISBN: 978-1-7281-9424-0
2 S.
International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) <46, 2021, Online>
Fraunhofer IMS ()
Biosensor; Terahertz (THz); photonic crystals

In this work, we demonstrate a photonic crystal (PC) resonator with a large hole in the center for biosensing in the terahertz (THz) regime. The design has the potential to be integrated with a microfluidic channel for automated pathogen detection. The strongly concentrated electric field around the hole and high Q factor lead to high sensitivity and high figure of merit (FOM) for a thin layer (in the µm range) of analyte. The resonator is fabricated by laser cutting of high resistance silicon (HRSi) and its sensing performance is experimentally characterized.