Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Transient effects during laser processing of silicon for photovoltaic applications

: Meyer, Fabian Stefan

Volltext urn:nbn:de:0011-n-6406449 (9.4 MByte PDF)
MD5 Fingerprint: 6e6c8e417041013ebaf6af9c3b6deb01
Erstellt am: 29.9.2021


Stuttgart: Fraunhofer Verlag, 2021, 177 S.
Zugl.: Freiburg, Univ., Diss., 2021
Solar Energy and Systems Research
ISBN: 978-3-8396-1742-7
Dissertation, Elektronische Publikation
Fraunhofer ISE ()
production engineering; applied physics; scientific equipment, experiments & techniques; Laser-Materialbearbeitung; Laser-Ablation; laser-annealing; pump-probe; Mikroskopie; Silicium-Photovoltaik; Materialforschung; Laser-Materialbearbeitung; Optische Messtechnik; Wissenschaftler; Ingenieur

Intense laser pulses deliver fine doses of highly concentrated energy to modify solid targets in an exceptionally well controllable manner. Two applications of this are treated herein: “laser annealing” as an approach to transfer amorphous silicon into the crystalline state and “laser ablation” to create local openings in dielectric layers for subsequent contacting. Both can be used in manufacturing of silicon solar cells as a cost-effective and environmentally friendly alternative to thermal and chemical processing. This work presents implementations of the pump-probe approach which enable the observation of the surface during and shortly after the arrival of a laser pulse. With an automated opto-mechanical setup concurrent physical processes happening in the material are made visible on the femtosecond to nanosecond scale. Using micro- and nano-characterization, modeling and simulations, this work shows how the absorption of intense laser pulses leads to phase transformations and material removal. It demonstrates that time-resolved observations are essential to investigate the origin of undesired side-effects, such as laser induced damage or incomplete layer removal.