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2020
Conference Paper
Titel
Modeling and validation of CMUTs with mechanically coupled plate actuators
Abstract
This paper presents a study of capacitive micromachined ultrasonic transducers with mechanically coupled actuators. Simulations, based on an analytical model, have been performed and compared to experimental results. The electrical admittance of the devices is utilized to determine the resonance frequency and the bandwidth of the devices in dependence of the diameter of the actuator. The structures fabricated exhibit resonance frequencies in the range of 400 - 900 kHz, which is beneficial for airborne applications. Deviations between theoretical and experimental results are assigned to material stress and squeeze film effects.