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Layer-thickness measurements with incoherent terahertz light

 
: Molter, D.; Kolano, M.; Klier, J.; Weber, S.; Jonuscheit, J.; Freymann, G. von

:

Markelz, A. ; Institute of Electrical and Electronics Engineers -IEEE-:
45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020 : November 8-13, 2020, a virtual event hosted from Buffalo, New York, USA
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-6621-6
ISBN: 978-1-7281-6620-9
S.511-512
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) <45, 2020, Online>
Englisch
Konferenzbeitrag
Fraunhofer ITWM ()

Abstract
We recently demonstrated the use of incoherent light from a superluminescent diode to drive a terahertz crosscorrelation spectroscopy system. Its application to layer-thickness measurement tasks is the scope of this contribution. The limitations and a comparison to layer-thickness measurements with a standard time-domain spectroscopy system is discussed with a special focus of the bandwidth-dependence of the layer-thickness evaluation result.

: http://publica.fraunhofer.de/dokumente/N-639301.html