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Comparison of Optoelectronic Time- and Frequency-Domain Systems for Single- and Multilayer Thickness Measurements

: Liebermeister, L.; Nellen, S.; Kohlhaas, R.B.; Lauck, S.; Deumer, M.; Breuer, S.; Globisch, B.


Markelz, A. ; Institute of Electrical and Electronics Engineers -IEEE-:
45th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2020 : November 8-13, 2020, a virtual event hosted from Buffalo, New York, USA
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-6621-6
ISBN: 978-1-7281-6620-9
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz) <45, 2020, Online>
Fraunhofer HHI ()

We present the first comparison of optoelectronic frequency- and time-domain terahertz (THz) systems for thickness measurements on sub-mm single- and multilayer samples using identical setups, samples and evaluation procedures in order to obtain comparable results. We find that single layer PET and Kapton foils with a thickness of 23 μm - 350 μm can be measured with similar accuracy with both systems. Hence, frequency-domain THz systems may replace time-domain systems in future industrial layer thickness measurements.