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DOE-based Multi-spot Confocal Interference Microscope

: Li, Zheng

Volltext urn:nbn:de:0011-n-6383749 (3.8 MByte PDF)
MD5 Fingerprint: 223ee5344283b3a07797e13e3e73bece
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Erstellt am: 28.7.2021

Beyerer, Jürgen (Ed.); Zander, Tim (Ed.):
Joint Workshop of Fraunhofer IOSB and Institute for Anthropomatics, Vision and Fusion Laboratory 2020. Proceedings : 27th to the 31st of July 2020, Karlsruhe
Karlsruhe: KIT Scientific Publishing, 2021 (Karlsruher Schriften zur Anthropomatik 51)
ISBN: 978-3-7315-1091-8
DOI: 10.5445/KSP/1000130397
Fraunhofer Institute of Optronics, System Technologies and Image Exploitation and Institute for Anthropomatics, Vision and Fusion Laboratory (Joint Workshop) <2020, Karlsruhe>
Konferenzbeitrag, Elektronische Publikation
Fraunhofer IOSB ()

Diffractive lens arrays are used to enhance the resolution of a low-numerical-aperture objective to perform high-resolution large-area measurements. However, the axial resolution of such setups is still fundamentally limited by the objective. This work introduces the concept of utilizing the reflected conjugate wave of the diffractive optical elements (DOEs) for interference measurements. A traceable step height target is measured and the experiment result shows that the proposed setup can improve the accuracy and reduce the measurement uncertainty in the axial direction.