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Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges

 
: Zheng, B.; Fu, Y.; Wang, K.; Tran, T.; Schuelke, T.; Fan, Q.H.

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Physics of plasmas 28 (2021), Nr.1, Art. 014504, 7 S.
ISSN: 1070-664X (Online)
ISSN: 1089-7674 (Print)
ISSN: 1527-2419 (CD-ROM)
Englisch
Zeitschriftenaufsatz
Fraunhofer CCD ()

Abstract
One-dimensional and two-dimensional particle-in-cell (PIC)/Monte Carlo collision simulations are performed for a balanced direct current magnetron sputtering (DCMS) discharge. The plasma parameters obtained by both simulations above the target racetrack share similar features and magnitudes under similar discharge intensities, i.e., similar local discharge current densities. The commonly observed high-energy tail of electron energy distribution in DCMS discharges is reproduced in both simulations. The accuracy and applicability of using one-dimensional simulations to qualitatively investigate the characteristics of balanced DCMS discharge are confirmed. In terms of capturing the key physical mechanisms in DCMS, one-dimensional PIC simulation is an efficient method, which could largely alleviate the computational expense and preserve the physical fidelity of modeling results.

: http://publica.fraunhofer.de/dokumente/N-637450.html