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Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films

: Mart, C.; Kämpfe, T.; Kühnel, K.; Czernohorsky, M.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.

Volltext ()

APL materials 9 (2021), Nr.5, Art. 051120, 7 S.
ISSN: 2166-532X
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IPMS ()

The hafnium oxide material class is characterized by the coexistence of several polymorphs between which phase transitions are induced by means of composition and external electric fields. Pyroelectric materials, which convert heat into electrical energy, exhibit the largest response at such morphotropic or field-induced phase transitions. The hafnium oxide material system is of special interest for pyroelectric applications since it allows for scalable and semiconductor-compatible fabrication. Here, we report large pyroelectric coefficients at the morphotropic transition from the ferroelectric orthorhombic to the centrosymmetric tetragonal phase. The electric field-induced transition between these two phases in doped HfO2 is found to yield large pyroelectric coefficients of up to −142 µCm−2 K−1, a value that is 20 times larger compared to AlN.