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Influence of seed layers on the reflectance of sputtered aluminum thin films

: Schmitt, P.; Stempfhuber, S.; Felde, N.; Szeghalmi, A.; Kaiser, N.; Tünnermann, A.; Schwinde, S.

Volltext ()

Optics Express 29 (2021), Nr.13, S.19472-19485
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()
aluminum layers; evaporation process; protective layer; reflection; seed layer

The fabrication of highly reflective aluminum coatings is still an important part of current research due to their high intrinsic reflectivity in a broad spectral range. By using thin seed layers of Cu, CuOx, Cr, CrOx, Au, and Ag, the morphology of sputtered (unprotected) aluminum layers and, consequently, their reflectance can be influenced. In this long-term study, the reflectance behavior was measured continuously using spectrophotometry. Particular seed layer materials enhance the reflectance of aluminum coatings significantly and reduce their long-term degradation. Combining such seed layers with evaporation processes and suitable protective layers could further increase the reflectance of aluminum coatings.