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High-resolution confocal microscopy with low-NA objectives based on diffractive lens arrays

: Li, Zheng; Taphanel, Miro; Längle, Thomas; Beyerer, Jürgen


Applied optics 60 (2021), Nr.22, S.F1-F5
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
ISSN: 2155-3165
Fraunhofer IOSB ()

High resolution and large fields of view are difficult to achieve simultaneously by microscope objectives. In this work, we develop a reflection confocal microscope based on diffractive lens arrays to solve the problem. We demonstrate a prototype that generates a spot array with a numerical aperture of 0.78. Laterally, experiments show a spatial cutoff frequency of 1024 lp/mm by a 0.15 NA objective, and 912 lp/mm by a 0.07 NA objective with a 785 nm diode laser. Axially, an average height of 961 nm with a standard deviation of 49 nm is measured with a 925.5 nm calibrated step height target.