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Me-DLC based strain sensitive materials

: Bandorf, Ralf; Grein, Maria; Gerdes, Holger; Correia, Rebeca; Heckmann, Ulrike; Bräuer, Günter

Volltext (PDF; - Gesamtes Book of Abstracts)

Ehiasarian, Arutiun (VeranstalterIn); Bandorf, Ralf (VeranstalterIn) ; Sheffield Hallam University; Network of Competence Industrial Plasma Surface Technology e.V. -INPLAS-, Braunschweig; High Value Manufacturing Catapult, Solihull; Henry Royce Institute, Manchester; Institute of Materials, Minerals and Mining -IOM3-, London; Surface Engineering Association -SEA-, Birmingham; Fraunhofer-Institut für Schicht- und Oberflächentechnik -IST-, Braunschweig:
Eleventh International Conference on HIPIMS 2021. Abstract Book : 14 - 18 June 2021, Sheffield, UK, Virtual
Sheffield, 2021
International Conference on Fundamentals and Industrial Applications of HIPIMS <11, 2021, Online>
Abstract, Elektronische Publikation
Fraunhofer IST ()

Sensors are essential component of the digitalization (Internet of Things, Industry 4.0, …). There are challenges arising in integrating sensors in existing workpieces and machines. Besides the integration boosting the sensitivity is an essential challenge. In the case of strain gauges a gauge factor of 2 is standard. Increasing the sensitivity mostly is connected with higher thermal sensitivity of the investigated materials. Furthermore, the applied process can influence the performance of the sensing materials. Therefore, this contribution will address development of metal containing diamond-like carbon films for strain sensing films with enhanced sensitivity while at the same time considering the thermal coefficient of resistance. As best solution a highly strain sensitive film with low or no thermal sensitivity is desired.