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Micro-mechanical external-cavity laser with wide tuning range

Mikromechanischer externer Resonatoraufbau mit weitem Durchstimmbereich
: Geerlings, E.; Rattunde, M.; Schmitz, J.; Kaufel, G.; Wagner, J.; Kallweit, D.; Zappe, H.


Institute of Electrical and Electronics Engineers -IEEE-:
20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007. Technical Digest : Kobe, January 21-25, 2007
New York, NY: IEEE, 2007
ISBN: 1-4244-0951-9
ISBN: 1-4244-0950-0
International Conference on Micro Electro Mechanical Systems (MEMS) <20, 2007, Kobe>
Fraunhofer IAF ()
external cavity; externer Resonator; laser; micromechanic; Mikromechanik; tunable laser; durchstimmbarer Laser; tiltable Si-grating; drehbares Si-Gitter

We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow-configuration. An electrostatically-actuated silicon-grating, optimized to achieve a wide tuning range in the 2.3 µm wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (µECL) was above 15 mW over the entire tuning range.