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Simulating MEMS loudspeakers

Presentation held at COMSOL Day: MEMS, 25.03.2021, Online
: Fritsch, Tobias; Küller, J.

Präsentation urn:nbn:de:0011-n-6339704 (3.6 MByte PDF)
MD5 Fingerprint: 1b93265b166759d9164788d690c0ed75
Erstellt am: 8.5.2021

2021, 23 Folien
COMSOL Day <2021, Online>
Vortrag, Elektronische Publikation
Fraunhofer IDMT ()
loudspeakers; MEMS loudspeaker; microacoustics

The simulation of classic loudspeakers covers several physical domains, ranging from the electrical drive over the vibrating mechanics to the acoustic coupling. But what does it look like for MEMS loudspeakers? Their new drive mechanisms in combination with their comparatively small sizes lead to additional challenges. Here, we are going to take a closer look at the modeling of microacoustics, considering thermoviscous effects and meshing the geometry down to submicrometer sizes, in particular.