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Combinatorial synthesis of thin mixed oxide films and automated study of their piezoelectric properties

: Rende, D.; Schwarz, K.; Rabe, U.; Maier, W.F.; Arnold, W.


Reller, A.:
International Conference on Provskites at EMPA 2005 : Properties and potential applications
Amsterdam: Elsevier, 2007 (Progress in solid state chemistry 35.2007, Nr.2-4)
ISSN: 0079-6786
International Conference on Provskites <2005, Dübendorf>
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer IZFP ()
PZT; combinatorial chemistry; high-throughput; sol-gel synthesis; AFM

The development of an automated production of thin films and the characterization of their piezoelectric properties in high-throughput are described. A library of 50 undoped as well as doped lead zirconate titanate Pb(Zr,Ti)O-3 (PZT) coatings was produced by sol deposition. Afterwards, the piezoelectric properties of the library films were analyzed by automated atomic force microscopy employing the ultrasonic piezo-mode.