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Temperature Scanner Based on MEMS-Technology
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2006
Conference Paper
Titel
Temperature Scanner Based on MEMS-Technology
Author(s)
Otto, T.
Saupe, R.
Stock, V.
Gessner, T.
Hauptwerk
Actuator 2006. 10th International Conference on New Actuators & 4th International Exhibition on Smart Actuators and Drive Systems
Konferenz
International Conference on New Actuators 2006
International Exhibition on Smart Actuators and Drive Systems 2006
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM