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Micro-and Nano-Structures for High-End Optics

 
: Zeitner, U.D.; Burmeister, F.; Fluegel-Paul, T.; Heusinger, M.

:

Institute of Electrical and Electronics Engineers -IEEE-; IEEE Photonics Society:
Twenty-fourth Microoptics Conference, MOC 2019 : November 17-20, 2019, Toyama International Conference Center, Toyama, Japan
Piscataway, NJ: IEEE, 2019
ISBN: 978-1-7281-2211-3
ISBN: 978-4-86348-712-3
S.312-313
Microoptics Conference (MOC) <24, 2019, Toyama>
Englisch
Konferenzbeitrag
Fraunhofer IOF ()

Abstract
Novel technology developments allow the fabrication of optical micro- and nano-structures on application relevant areas with extreme precision and high flexibility. The contribution reviews the technological challenges, demonstrates suitable solutions, and gives an insight into today's high-end applications of such lithographically realized structures.

: http://publica.fraunhofer.de/dokumente/N-629192.html