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Development of passive alignment techniques for the assembly of hybrid microsystems

Entwicklung passiver Justiertechniken für die Montage hybrider Mikrosysteme
: Brecher, C.; Weinzierl, M.; Lange, S.C.


Ratchev, S. ; International Federation for Information Processing -IFIP-, Working Group 5.5 Co-operation Infrastructure for Virtual Enterprises and Electronic Business; Univ. of Nottingham:
Precision Assembly Technologies for Mini and Micro Products : Proceedings of the IFIP TC5 WG5.5 Third International Precision Assembly Seminar (IPAS 2006), 19-21 February 2006, Bad Hofgastein, Austria
Berlin: Springer, 2006 (International Federation for Information Processing 198)
ISBN: 0-387-31276-5
ISBN: 978-0-387-31276-5
ISBN: 978-0-387-31277-4
ISBN: 978-0-387-31276-7
International Precision Assembly Seminar (IPAS) <3, 2006, Bad Hofgastein>
Fraunhofer IPT ()
microsystem; microtechnology; Mikrosystemtechnik; Montage; Ultrapräzisionsmaschine

Conventional machining methods have been developed to meet the standards of ultra precision machining. Special milling processes utilizing mono-crystalline diamond tools, the so-called fly-cutting processes, are used successfully to manufacture highly precise microstructures with an optical surface finish. In micro assembly often positioning accuracies of only a few micro meters are needed. An approach of the Fraunhofer IPT is to achieve these accuracies using passive alignment strategies. In this paper, the ultra precision machining of the v-groove structures as well as their passive alignment capacities for micro assembly tasks are presented.