Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

On-line re-engineeering of interference coatings

: Wilbrandt, S.; Stenzel, O.; Kaiser, N.; Trubetskov, M.K.; Tikhonravov, A.V.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
Fraunhofer IOF ()
materials and process characterization; optical property; thin film

We demonstrate the potentialities of our new optical monitor (OptiMon) to perform transmission measurements, re-engineering and recalibration of quartz monitor tooling factors during a deposition process. Examples include single layers as well as high-low stacks.