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Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation

: Füchsel, K.; Schulz, U.; Kaiser, N.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
Fraunhofer IOF ()
thin film; coating; other property

ITO films are suitable to achieve transparent and conductive thin films for a multiplicity of applications. Electrical and optical properties of ITO films prepared by plasma ion-assisted deposition at low substrate temperatures will be presented.