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2006
Conference Paper
Titel
Aluminium-rich Ti(1-x)Al(x)N coatings by CVD
Abstract
The performance of cutting tools can be increased by wear resistance coatings with improved properties. Up to now hard Ti(1-x)Al(x)N coatings with the NaCl structure have been prepared industrially by PVD (physical vapour deposition) processes with a maximum x=0.65. Higher x lead to the co-deposition of the softer hexagonal wurtzite phase. In this work the preparation of fcc-TiAlN (face centered cubic) coatings with x up to 0.9 by thermal CVD (chemical vapor deposition) is described for the first time. A LPCVD (low pressure chemical vapor deposition) process using TiCl4, AlCl3, NH3, H2, N2 and Ar is applied. At deposition temperatures between 700 deg C and 900 deg C very hard Ti(1-x)Al(x)N layers with 0.8 < x < 0.9 were prepared. The layers possess a high hardness between 3000 HV and 3300 HV and a Young's modulus up to 540 GPa. In first wear tests a high performance of the CVD-Ti(1-x)Al(x)N is observed. Coated inserts show a reduced wear by 30 % in comparison with a state-of-the-art PVD coating in reaming of steel and cast iron.
Language
English
Tags
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experimentelle Untersuchung
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CVD-Beschichtung
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Niederdruckgasphasenabscheidung
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Vickershärte
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Mikrohärte
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Nanoeindringprüfung
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Hartmetall
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Substrat
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Gusseisen
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Stahl
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Inconel
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Plasma-CVD
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Röntgenbeugung
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Rasterelektronenmikroskopie
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Young-Modul
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energiedispersive Röntgenspektrometrie (EDXS)
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kubischflächenzentriertes Gitter
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hexagonale Kristallstruktur
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Konzentrationseinfluss
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physikalisches Aufdampfen
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Titannitrid
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Reiben=Aufbohren
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Drehen=Bearbeiten
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Feinkorn
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Grobkorn
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Oxidationsbeständigkeit
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Titanaluminiumnitrid
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Gitterkonstante
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Kristallgitter
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Verschleißfestigkeit