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Design routine and characterisation of a biconic deformable metal mirror for focus shifting

: Böttner, P.; Brady, A.; Reinlein, C.; Eberhardt, R.; Nolte, S.

Volltext ()

Optics Express 29 (2021), Nr.3, S.2971-2983
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()
deformation; mechanical actuators; mirrors

This paper describes an opto-mechanical concept of a deformable metal mirror membrane, which can shift the focus position over a large range by use of a single actuator. The core element of the mirror is a diamond turned tulip-shaped membrane, the design is optimized to correct astigmatic aberrations which arise from the use of a curved mirror under a deflection angle. For this purpose, the target mirror surface is biconic. The manufactured mirror was tested with a maximum central deflection of 28 μm and, when used in combination with a 200 mm focal lens, is capable of producing a focus shift of up to 17.9 mm with a resulting wavefront aberration of 238.7 nm RMSerror.