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Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers

: Siefke, T.; Rojas Hurtado, C.B.; Dickmann, J.; Dickmann, W.; Käseberg, T.; Meyer, J.; Burger, S.; Zeitner, U.; Bodermann, B.; Kroker, S.

Volltext ()

Optics Express 28 (2020), Nr.16, S.23122-23132
ISSN: 1094-4087
Zeitschriftenaufsatz, Elektronische Publikation
Fraunhofer IOF ()
deep ultraviolet; scanning electron microscopy; semiconductor device manufacture; structural information

We demonstrate the retrieval of deep subwavelength structural information in nano-optical polarizers by scatterometry of quasi-bound states in the continuum (quasi-BICs). To this end, we investigate titanium dioxide wire grid polarizers for application wavelengths in the deep ultraviolet (DUV) spectral range fabricated with a self-aligned double-patterning process. In contrast to the time-consuming and elaborate measurement techniques like scanning electron microscopy, asymmetry induced quasi-BICs occurring in the near ultraviolet and visible spectral range provide an easily accessible and efficient probe mechanism. Thereby, dimensional parameters are retrieved with uncertainties in the sub-nanometer range. Our results show that BICs are a promising tool for process control in optics and semiconductor technology.