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Roughness evolution and scatter losses of multilayers for 193 nm

: Schröder, S.; Duparre, A.; Tünnermann, A.

Kaiser, N. ; Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical Interference Coatings 2007. CD-ROM : Topical Meeting and Tabletop Exhibit, Tucson, June 3-8, 2007. Technical digest
Washington, DC: OSA, 2007
ISBN: 1-55752-841-1
Optical Interference Coatings Topical Meeting and Tabletop Exhibit (OIC) <2007, Tucson/Ariz.>
Fraunhofer IOF ()
thin films; scattering; optics at surfaces; roughness

The roughness and angle resolved scattering of all-fluoride highly reflective mirrors for 193 nm
deposited onto differently polished substrates were measured and analyzed. The influence of interface roughness
and optical film thicknesson the scatter losses is discussed.