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Determining Elastic Constants of AlScN Films on Silicon Substrates by Laser Ultrasonics

 
: Rogall, Olga; Feil, Niclas M.; Ding, Anli; Mayer, Elena; Pupyrev, Pavel D.; Lomonosov, Alexey M.; Zukauskaite, Agne; Ambacher, Oliver; Mayer, Andreas P.

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Institute of Electrical and Electronics Engineers -IEEE-; IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society:
IEEE International Ultrasonics Symposium, IUS 2020. Symposium Proceedings : September 7-11, 2020, Las Vegas, NV, USA, Online Event
Piscataway, NJ: IEEE, 2020
ISBN: 978-1-7281-5448-0
ISBN: 978-1-7281-5449-7
4 S.
International Ultrasonics Symposium (IUS) <2020, Online>
Englisch
Konferenzbeitrag
Fraunhofer IAF ()
laser ultrasound; aluminium scandium nitride; surface acoustic waves

Abstract
Laser ultrasound was used to determine dispersion curves of surface acoustic waves on a Si (001) surface covered by AlScN films with a scandium content between 0 and 41%. By including off-symmetry directions for wavevectors, all five independent elastic constants of the film were extracted from the measurements. Results for their dependence on the Sc content are presented and compared to corresponding data in the literature, obtained by alternative experimental methods or by ab-initio calculations.

: http://publica.fraunhofer.de/dokumente/N-618242.html