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2020
Report
Titel
Silicon-based microfluid control and switching valves using lateral electrostatic bending actuators
Titel Supplements
White paper
Abstract
In this paper, the design and implementation of two novel electrostatic 2/2-way microvalves are reported. The innovation claims include: (1) implementation of an in-plane electrostatic driving mechanism in a microvalve device using Nanoscopic Electrostatic Drive (NED) bending actuators; (2) parallelization of flow orifices over the device minimizing the hydraulic device resistance, thus enabling high throughput flow rates up to 200 sccm at 1 bar for gases.
Author(s)
Verlag
Fraunhofer IPMS
Verlagsort
Dresden