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High-speed data storage and processing for projection mask-less lithography systems

: Voss, S.-H.; Talmi, M.; Saniter, J.; Eindorf, J.; Reisig, A.; Heinitz, J.; Haugeneder, E.


Microelectronic engineering 83 (2006), Nr.4-9, S.976-979
ISSN: 0167-9317
Fraunhofer HHI ()
feldprogrammierbare-Gate-Array-Schaltung; Hochgeschwindigkeit; Lithographie; optische Datenverarbeitung; optische Verbindung; Parallelverarbeitung; buffer circuit; field programmable gate arrays; high-speed technique; lithography; optical information processing; optical interconnections; optical links; parallel processing

Advantageous optical interconnect technology was chosen for the projection mask-less lithography application to transmit the exposure data to the blanking plate electronics inside a high-voltage vacuum area. Ensuring continuous and reliable operation requires a dedicated preparation and buffering of the transmission data. This paper presents the implementation aspects and the design of a high-speed buffer system based on the field programmable gate array (FPGA) technology. The high data rates and the highly parallelized system operation require a specific architecture and careful signal integrity design for proper functionality.