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Lamination and laser structuring for a DEP microwell array

: Jung, E.; Manessis, D.; Neumann, A.; Böttcher, L.; Braun, T.; Bauer, J.; Reichl, H.

IEEE Components, Packaging, and Manufacturing Technology Society; Institute of Electrical and Electronics Engineers -IEEE-:
Design, Test, Integration and Packaging of MEMS/MOEMS : Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS, 25 - 27 April 2007, Stresa, Lago Maggiore, Italy
Grenoble: EDA Publishing, 2007
ISBN: 978-2-35500-000-3
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS <2007, Stresa>
Fraunhofer IZM ()

Microtechnology becomes a versatile tool for biological and biomedical applications. Microwells have been established long but remained non-intelligent up to now. Merging new fabrication techniques and handling concepts with microelectronics enables to realize intelligent microwells suitable for future improved cancer treatment. The described technology depicts the basis for the fabrication of electronically enhanced microwell. Thin aluminium sheets structured by laser micro machining and laminated succesively to obtain registration tolerances of the respective layers of <5 µm. The microwells lasermachined into the laminate are with 50...350 µm diameter, allowing to contain individual cells within the microwell as well as provide access holes for the layer-to-layer contacting. A permeable membrane attached to the bottom of the microwell palte is used for fluid handling. The individual process steps are described and results on the microstructuring as well as on biocompatibility of the materials are given.