Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Analysis of CMOS Metallization Trenches using Angle-Resolved XPS

Poster presented at 18th European Conference on Applications of Surface and Interface Analysis, ECASIA 2019, September 15 - 20, 2019, Dresden, Germany
 
: Wehring, Bettina; Gerlich, Lukas; Wislicenus, Marcus

2019, 1 Folie
European Conference on Applications of Surface and Interface Analysis (ECASIA) <18, 2019, Dresden>
Englisch
Poster
Fraunhofer IPMS ()
Anfrage beim Institut / Available on request from the institute bibliothek@ipms.fraunhofer.de

: http://publica.fraunhofer.de/dokumente/N-603175.html